ycchem

YCCHEM

SCR-100

본문

The working mechanism of a photoresist composition is that, during the exposure process, the photoacid generator produces acid upon receiving light, and this acid triggers an acid-catalyzed reaction in the photoresist resin. In a positive photoresist composition, a deprotection reaction occurs, and this reaction creates a difference in solubility between the exposed and unexposed areas in the developer, thereby forming the pattern.

SCROLL

TOP